Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/038042
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which a piezoelectric layer can be more reliably formed into a convex shape and heat dissipation can be effectively improved. An elastic wave device 1 comprises: a support member (support substrate 4); a piezoelectric layer 6 that is provided on the support member, has an anisotropic linear expansion coefficient, and has first and second main surfaces 6a and 6b that are opposed to each other; a first electrode 7 provided on the first main surface 6a of the piezoelectric layer 6; and a second electrode 8 provided on the second main surface 6b and opposite the first electrode 7. The support substrate 4 has a cavity 10. At least parts of the first electrode 7 and the second electrode 8 overlap the cavity 10 in plan view. The support member is positioned on the first main surface 6a side of the piezoelectric layer 6, and a heat dissipation structure including the support member is formed. The first main surface 6a of the piezoelectric layer 6 includes a first region 6c where the first electrode 7 is provided. The second main surface 6b includes a second region 6d where the second electrode 8 is provided. One of the first region 6c and the second region 6d is a high-heat-dissipation region having higher heat dissipation due to the heat dissipation structure than the other region. Both the first and second electrodes 7 and 8 include an electrode layer having a coefficient of linear expansion greater than the maximum coefficient of linear expansion of the piezoelectric layer 6. Where the product of the thickness-average value of the linear expansion coefficient and the total thickness of the electrode is defined as the linear expansion property of the electrode, the linear expansion property of the electrode, among the first and second electrodes 7 and 8, that is provided in the high-heat-dissipation region is larger than the linear expansion property of the other of the first and second electrodes 7 and 8.
Inventors:
HARUTA KAZUMASA (JP)
Application Number:
PCT/JP2022/033498
Publication Date:
March 16, 2023
Filing Date:
September 07, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17
Attorney, Agent or Firm:
OSAKA FRONT (JP)
Download PDF:
Previous Patent: METHOD FOR DESIGNING TENSION SPRING, AND TENSION SPRING
Next Patent: BENZOXAZINE COMPOSITION AND USE THEREOF
Next Patent: BENZOXAZINE COMPOSITION AND USE THEREOF