Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR, ELECTRICAL MEASUREMENT-TYPE SURFACE PLASMON RESONANCE SENSOR CHIP, AND METHOD FOR DETECTING CHANGE IN SURFACE PLASMON RESONANCE
Document Type and Number:
WIPO Patent Application WO/2021/075529
Kind Code:
A1
Abstract:
An electric measurement-type surface plasmon resonance sensor 510 comprises a plasmon resonance enhancing sensor chip 110 and an electrical measurement device 21. The plasmon resonance enhancing sensor chip 110 comprises a sensor chip 101 and a prism 1. In the sensor chip 101, an electrode 2, a silicon semiconductor film 3, and a plasmon resonance film electrode 4 are disposed in this order. In the plasmon resonance enhancing sensor chip 110, the prism 1, the electrode 2, the silicon semiconductor film 3, and the plasmon resonance film electrode 4 are disposed in this order. The electrical measurement device 21 measures an electric current or voltage directly from the electrode 2 and the plasmon resonance film electrode 4.

Inventors:
SANA AMRITA (JP)
ALLISON GILES (JP)
SUZUKI HIRONORI (JP)
KATO HIDEMI (JP)
ANDO MASAO (JP)
LE VIET CUONG (JP)
Application Number:
PCT/JP2020/039026
Publication Date:
April 22, 2021
Filing Date:
October 16, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
IMRA JAPAN KK (JP)
International Classes:
H01L31/0232; G01N21/41; G01N27/00; H01L31/10; H01L31/108
Domestic Patent References:
WO2019031591A12019-02-14
Foreign References:
JP2011141265A2011-07-21
JP2000356587A2000-12-26
JP2018189523A2018-11-29
JP2012038541A2012-02-23
Other References:
TAKASHI MATSUKAWA ET AL., JPN. J. APPL. PHYS., vol. 53, 2014, pages 04EC11
TRANSPARENT CONDUCTIVE FILMS, vol. 2, pages 195
Attorney, Agent or Firm:
CENTCREST IP ATTORNEYS (JP)
Download PDF: