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Title:
ELECTRODE-EMBEDDED MEMBER AND METHOD FOR MANUFACTURING SAME, ELECTROSTATIC CHUCK, AND CERAMIC HEATER
Document Type and Number:
WIPO Patent Application WO/2020/196339
Kind Code:
A1
Abstract:
An electrode-embedded member 1 comprises: a ceramic base body 2; an electrode 3; a connection member 4 that includes tungsten and/or molybdenum and that is embedded in the base body 2 in a state in which one principal surface 4a faces the electrode 3 side and is electrically connected to the electrode 3; and a hole part 5 that extends from the outer surface of the base body 2 to another principal surface 4b of the connection member 4. A buffer member 10 embedded in the base body 2 includes at least a ceramic material that constitutes the base body 2 and a conductive material of which tungsten and/or molybdenum is a constituent element. The buffer member 10 covers at least a portion of an edge part of the connection member 4.

Inventors:
YABUHANA MASAKI (JP)
Application Number:
PCT/JP2020/012499
Publication Date:
October 01, 2020
Filing Date:
March 19, 2020
Export Citation:
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Assignee:
NGK SPARK PLUG CO (JP)
International Classes:
H05B3/02; C04B35/581; C04B35/645; H01L21/683; H05B3/12; H05B3/74
Foreign References:
JP2018016536A2018-02-01
JP2003124299A2003-04-25
JP2001010873A2001-01-16
JPH1112053A1999-01-19
JP2008130609A2008-06-05
Attorney, Agent or Firm:
SATO & ASSOCIATES (JP)
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