Title:
ELECTRON BEAM AND DROPLET-BASED EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/038448
Kind Code:
A1
Abstract:
A light source device according to an embodiment of the present invention is a light source device that outputs light from an extreme ultraviolet light source, on the basis of an electron beam and a metal droplet, the light source device comprising: a chamber; an electron beam emitting unit including a cathode electrode and a plurality of emitters including a carbon-based material and disposed on the cathode electrode to be spaced apart from each other, the electron beam emitting unit generating an electron beam inside the chamber; an anode electrode positioned inside the chamber to be spaced apart from the electron beam emitting unit; and a droplet generating device for ejecting metal droplets into a space between the electron beam emitting unit and the anode electrode in the chamber, wherein the droplets are ionized in the chamber by the electron beam directed toward the anode electrode to generate plasma, and extreme ultraviolet rays are generated from the plasma.
Inventors:
PARK KYU CHANG (KR)
YOO SUNG TAE (KR)
YOO SUNG TAE (KR)
Application Number:
PCT/KR2022/013487
Publication Date:
March 16, 2023
Filing Date:
September 07, 2022
Export Citation:
Assignee:
UNIV INDUSTRY COOPERATION GROUP KYUNG HEE UNIV (KR)
International Classes:
H05G2/00; G03F7/20
Foreign References:
| JP2007012603A | 2007-01-18 | |||
| JP2012146682A | 2012-08-02 | |||
| JP2007200615A | 2007-08-09 | |||
| KR101341672B1 | 2013-12-16 | |||
| JP2005251735A | 2005-09-15 |
Attorney, Agent or Firm:
OH, Se Joong (KR)
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