Title:
ELECTRON BEAM EMITTING DEVICE OF CATHODE STRUCTURE HAVING SUPPRESSOR AND THREE-DIMENSIONAL LAMINATING APPARATUS INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2019/035625
Kind Code:
A1
Abstract:
The present invention relates to an electron beam emitting device of a cathode structure having a suppressor, capable of suppressing the occurrence of an arc and adjusting a converging angle of an electron beam, and according to one aspect of the present invention, disclosed is an electron beam emitting device of a cathode structure having a suppressor, comprising: an anode; a cathode provided so as to face the anode; and a suppressor, which is provided to be spaced apart from the electron beam emitting surface of the cathode in a direction toward the anode and is electrically connected to the cathode, wherein the central portion of the cathode, from which the electron beam is emitted, becomes open so as to be exposed when seen from the anode side, and the edge portion of the cathode is formed to be covered.
Inventors:
KANG EUN GOO (KR)
CHOI HON JONG (KR)
CHOI HON JONG (KR)
Application Number:
PCT/KR2018/009300
Publication Date:
February 21, 2019
Filing Date:
August 14, 2018
Export Citation:
Assignee:
KOREA INST IND TECH (KR)
International Classes:
H01J3/02
Foreign References:
| KR20160029966A | 2016-03-16 | |||
| US20150371857A1 | 2015-12-24 | |||
| KR20160132270A | 2016-11-17 | |||
| JP2015150886A | 2015-08-24 |
Other References:
"The Ion Source", CASE TECHONOLOGY INC, 30 April 2016 (2016-04-30), XP055577604, Retrieved from the Internet
Attorney, Agent or Firm:
KO, Young Kap (KR)
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