Title:
ELECTRON EMITTING ELEMENT AND ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2020/225991
Kind Code:
A1
Abstract:
Provided are: an electron emitting element having a narrow electron energy width and excellent electron emission efficiency; and an electron microscope using the same. The electron emission element includes a laminate structure in which a first electrode, an electron acceleration layer made of an insulation film, and a second electrode are laminated in this order, wherein the second electrode allows electrons to be transmitted and emits electrons from the surface thereof, and the energy width of the emitted electrons is 100-600 meV. For example, 1 to 20 layers of graphene can be used as the second electrode, and hexagonal boron nitride can be used as the insulation film.
Inventors:
MURAKAMI KATSUHISA (JP)
NAGAO MASAYOSHI (JP)
NAGAO MASAYOSHI (JP)
Application Number:
PCT/JP2020/012711
Publication Date:
November 12, 2020
Filing Date:
March 23, 2020
Export Citation:
Assignee:
AIST (JP)
International Classes:
H01J37/06; H01J1/312; H01J9/02; H01J37/073
Foreign References:
| JPH07134939A | 1995-05-23 | |||
| US3535598A | 1970-10-20 | |||
| JP2017045639A | 2017-03-02 | |||
| JP2005190878A | 2005-07-14 | |||
| JPH09259737A | 1997-10-03 | |||
| JP2007264429A | 2007-10-11 | |||
| JP2001006529A | 2001-01-12 | |||
| JP2009043440A | 2009-02-26 | |||
| JP2017045639A | 2017-03-02 |
Other References:
K. MURAKAMI ET AL., APPLIED PHYSICS LETTERS, vol. 108, 2016, pages 083506
K. MURAKAMI ET AL., APPLIED PHYSICS LETTER, vol. 106, 2015, pages 093112
See also references of EP 3968352A4
K. MURAKAMI ET AL., APPLIED PHYSICS LETTER, vol. 106, 2015, pages 093112
See also references of EP 3968352A4
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