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Patent Searching and Data


Title:
ELECTRON GUN AND ELECTRON-BEAM APPLICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/084684
Kind Code:
A1
Abstract:
The present invention achieves increased brightness of electron beams emitted by a photoexcitation electron gun. An electron gun (15) comprises: a photocathode (1) having a substrate (11) and a photoelectric film (10); a light source (7) that emits pulse excitation light (12); a condenser lens (2) that condenses the pulse excitation light (12) toward the photocathode (1); and an extraction electrode (3) that is disposed facing the photocathode (1) and accelerates an electron beam (13), which is generated from the photoelectric film (10), by virtue of the pulse excitation light (12) being condensed by the condenser lens (2) and passing through the substrate (11) of the photocathode (1) to be incident upon the extraction electrode (3). The pulse excitation light (12) is condensed at different locations of the photoelectric film (10) of the photocathode (1) at different timings.

Inventors:
OHSHIMA TAKASHI (JP)
MORISHITA HIDEO (JP)
IDE TATSURO (JP)
KOHMU NAOHIRO (JP)
ENYAMA MOMOYO (JP)
OSE YOICHI (JP)
AGEMURA TOSHIHIDE (JP)
KATANE JUNICHI (JP)
Application Number:
PCT/JP2019/042781
Publication Date:
May 06, 2021
Filing Date:
October 31, 2019
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/073; H01J1/34; H01J37/28
Foreign References:
JPH11509360A1999-08-17
JP2019057387A2019-04-11
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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