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Patent Searching and Data


Title:
ELECTRON GUN
Document Type and Number:
WIPO Patent Application WO/2021/070289
Kind Code:
A1
Abstract:
This electron gun is provided with: an emitter having an electron emittance surface; a first electrode as an extraction electrode; and a second electrode having a second surface facing a first surface of the first electrode, wherein the second surface of the second electrode has a first region and a second region that have mutually different distances from the center of the electron emittance surface, and the curvature of the first region differs from the curvature of the second region.

Inventors:
GOTO TAKAKUNI (JP)
ISHIKAWA MOTOFUSA (JP)
Application Number:
PCT/JP2019/039850
Publication Date:
April 15, 2021
Filing Date:
October 09, 2019
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
H01J3/18; C23C14/30; H01J1/304; H01J3/02
Foreign References:
JPH1167111A1999-03-09
JPH0963489A1997-03-07
JPS50146263A1975-11-22
JPS54117058U1979-08-16
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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