Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2018/055715
Kind Code:
A1
Abstract:
The problem addressed by the present invention is to provide an electron microscope that can be activated at a suitable temperature by disposing a non-evaporative getter (NEG) at an extraction electrode in the vicinity of an electron source. The present invention pertains to an electron microscope provided with an electron gun, the electron microscope being characterized in that the electron gun is provided with an electron source, an extraction electrode, and an accelerating tube, wherein the accelerating tube is connected to the extraction electrode at a connection location, the extraction electrode is provided with a first heater and a first NEG, and the first heater and the first NEG are spaced away from each other in the axial direction of an electron beam emitted from the electron source.
Inventors:
ONISHI TAKASHI (JP)
Application Number:
PCT/JP2016/077926
Publication Date:
March 29, 2018
Filing Date:
September 23, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/16; H01J7/18; H01J37/073; H01J37/28
Foreign References:
| JP2007311117A | 2007-11-29 | |||
| JPS5172278A | 1976-06-22 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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