Title:
ELECTRON MULTIPLIER PRODUCTION METHOD AND ELECTRON MULTIPLIER
Document Type and Number:
WIPO Patent Application WO/2018/043029
Kind Code:
A1
Abstract:
The invention provides a method for producing an electron multiplier that comprises a main body part and a channel provided in the main body part in such a manner as to open at one end surface and at the other end surface of the main body part and emitting a secondary electron in response to an incident electron, said method comprising: a first step of preparing a main body member having the one end surface and the other end surface and provided with a communication hole for the channel wherethrough the one end surface and the other end surface communicate; a second step of forming on the outer surface of the main body member and the inner surface of the communication hole, via the atom layer deposition method, a deposit layer containing at least a resistance layer, thereby forming the channel; and a third step of removing the deposit layer formed on the outer surface of the main body member, thereby forming the main body part.
More Like This:
Inventors:
KOBAYASHI HIROSHI (JP)
SUGIURA GINJI (JP)
SUGIURA GINJI (JP)
Application Number:
PCT/JP2017/028280
Publication Date:
March 08, 2018
Filing Date:
August 03, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J9/12; H01J1/34; H01J43/20
Domestic Patent References:
WO2014050260A1 | 2014-04-03 |
Foreign References:
JPH03116626A | 1991-05-17 | |||
JPS50115970A | 1975-09-10 | |||
JPH02297857A | 1990-12-10 | |||
JPS46005767A |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF: