Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRONIC BEAM RECORDING BOARD
Document Type and Number:
WIPO Patent Application WO/2005/114332
Kind Code:
A1
Abstract:
An electronic beam recording board which can reduce backscattering degree of backscattering electrons and improve resolution of a latent image drawing. The electronic beam recording board holding the resist film whereupon information recording is to be performed by electronic beams is provided with a surface layer area composed of a material having a larger mean free path of an electron, which advances inside by electronic beam irradiation from the resist film side, than a prescribed value.

Inventors:
KATSUMURA MASAHIRO (JP)
Application Number:
PCT/JP2005/009489
Publication Date:
December 01, 2005
Filing Date:
May 18, 2005
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PIONEER CORP (JP)
KATSUMURA MASAHIRO (JP)
International Classes:
G03F7/09; G03F7/20; G11B7/26; H01L21/027; (IPC1-7): G03F7/20; G03F7/09; G11B7/26; H01L21/027
Foreign References:
JP2004119414A2004-04-15
JPH07169675A1995-07-04
JPS5568626A1980-05-23
JP2004103733A2004-04-02
JPS5745541A1982-03-15
JP2004264415A2004-09-24
Attorney, Agent or Firm:
Fujimura, Motohiko (Togeki Bldg. 1-1 Tsukiji 4-chom, Chuo-ku Tokyo 45, JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: RESIST COMPOUND AND RESIST COMPOSITION

Next Patent: RUNTIME ADAPTABLE PROTOCOL PROCESSOR