Title:
ELECTROSTATIC ACTUATOR, VARIABLE-CAPACITANCE CAPACITOR, ELECTRIC SWITCH, AND ELECTROSTATIC ACTUATOR DRIVING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/153566
Kind Code:
A1
Abstract:
The present invention enables stiction to be prevented by means of a simple configuration. This electrostatic actuator is equipped with: a fixed drive electrode (21) that is provided on a silicon substrate (2); a movable drive electrode (22) that is provided so as to face the fixed drive electrode (21), and is brought close to the fixed drive electrode (21) by means of an electrostatic force generated between the movable drive electrode and the fixed drive electrode (21); and a pair of spacers (25) that contact the movable drive electrode (22) when in a state in which the fixed drive electrode (21) and the movable drive electrode (22) are in proximity of each other, and form a prescribed air gap between the fixed drive electrode (21) and the movable drive electrode (22). Each spacer (25) has a spacer electrode (31) that comes into contact with the movable drive electrode (22) via an insulator and has the same potential as that of one of the electrodes at least in the state of proximity.
Inventors:
HANIHARA KOUJI (JP)
Application Number:
PCT/JP2012/002466
Publication Date:
October 17, 2013
Filing Date:
April 09, 2012
Export Citation:
Assignee:
PIONEER CORP (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
HANIHARA KOUJI (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
HANIHARA KOUJI (JP)
International Classes:
H02N13/00
Foreign References:
| JP2007287468A | 2007-11-01 | |||
| JP2009075209A | 2009-04-09 | |||
| JP2004172504A | 2004-06-17 |
Attorney, Agent or Firm:
OCHIAI, MINORU (JP)
Ochiai 稔 (JP)
Ochiai 稔 (JP)
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