Title:
ELECTROSTATIC ATTRACTION DEVICE AND NEUTRALIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/195959
Kind Code:
A1
Abstract:
An electrostatic attraction device having an electrostatic chuck in which an electrode and a heater are contained inside a dielectric, wherein the electrostatic attraction device has a DC power source unit having a DC power source that supplies DC power to the electrode, a first neutralizing circuit connected to the power supply path between the DC power source and the electrode, and a second neutralizing circuit connected to the power supply path between the first neutralizing circuit and the electrode, the first neutralizing circuit having a first ground relay that can connect and disconnect the electrode and the ground side via a voltage-drop resistance member, and the second neutralizing circuit having an isolation relay that can connect and disconnect the first neutralizing circuit and the second neutralizing circuit, and a second ground relay that is connected to the power supply path between the isolation relay and the electrode, and can connect and disconnect the electrode and the ground side without going through a resistance member.
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Inventors:
KAWAWA TAKAHIRO (JP)
HOSAKA HIDEOMI (JP)
HOSAKA HIDEOMI (JP)
Application Number:
PCT/JP2020/011126
Publication Date:
October 01, 2020
Filing Date:
March 13, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H02N13/00; H01L21/205; H01L21/3065; H01L21/683
Domestic Patent References:
| WO2006049085A1 | 2006-05-11 |
Foreign References:
| US20120200981A1 | 2012-08-09 | |||
| JP2008047564A | 2008-02-28 | |||
| JP2009152434A | 2009-07-09 | |||
| JPH08293486A | 1996-11-05 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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