Title:
END POINT DETECTING DEVICE AND END POINT DETECTING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/029264
Kind Code:
A1
Abstract:
This end point detecting device has a trained model obtained by machine learning of waveforms of measurement data between the start of polishing and the end of polishing that have been output during polishing in the past from each of a plurality of types of end point detecting sensors provided in one polishing unit. The end point detecting device is provided with a determination unit that receives, as an input, measurement data between the start of polishing and the current point of time that have been newly output during polishing from each of the plurality of types of end point detecting sensors, and estimates, as an output, whether the current point of time is the timing for an end point indicating the end of polishing.
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Inventors:
MATSUO HISANORI (JP)
Application Number:
PCT/JP2020/029746
Publication Date:
February 18, 2021
Filing Date:
August 04, 2020
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
B24B37/013; B24B49/10; B24B49/12; B24B49/14; B24B49/16; H01L21/304
Domestic Patent References:
| WO2018194929A1 | 2018-10-25 | |||
| WO2018102222A1 | 2018-06-07 |
Foreign References:
| JP2018058197A | 2018-04-12 | |||
| JP2017515307A | 2017-06-08 | |||
| US20190143474A1 | 2019-05-16 | |||
| JP2009004442A | 2009-01-08 |
Attorney, Agent or Firm:
OHNO Seiji et al. (JP)
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