ENVIRONMENTALLY FRIENDLY PHOTOACID GENERATORS (PAGS) WITH NO PERFLUOROOCTYL SULFONATES (PFOS)

Title:

ENVIRONMENTALLY FRIENDLY PHOTOACID GENERATORS (PAGS) WITH NO PERFLUOROOCTYL SULFONATES (PFOS)

Document Type and Number:

WIPO Patent Application WO2005089355

Kind Code:

A3

Abstract:

Novel classes of ionic photoacid generator (PAGs) compounds having relatively environmentally friendly anions with no perfluorooctyl sulfonate (no-PFOS) are provided and photoresist composition that comprise such compounds. The new PAGs produce a photoacid having a short or no perfluoro alkyl chain (ie., no-PFOS) attached to a variety of functional groups. The PAGs of the invention are useful as photoactive component in the chemically amplified resist compositions used for microfabrication.

Inventors:

OBER CHRISTOPHER K (US)
AYOTHI RAMAKRISHNAN (US)
KIM KYUNG-MIN (KR)
LIU XIANG-QIAN (US)

Application Number:

PCT/US2005/008678

Publication Date:

April 27, 2006

Filing Date:

March 16, 2005

Export Citation:

Click for automatic bibliography generation Help

Assignee:

CORNELL RES FOUNDATION INC (US)

International Classes:

C07C309/10; G03C1/492; G03F7/004; G03F7/038; G03F7/039; (IPC1-7): G03C1/73; G03F7/039; G03F7/20; G03F7/30

Foreign References:

US20030219679A1

2003-11-27

Download PDF:

View/Download PDF PDF Help

Previous Patent: APPARATUS AND METHOD FOR APPLYING VARIABLE LOCALIZED PRESSURE TO THE HUMAN BODY

Next Patent: SYSTEM AND METHOD FOR TRANSFORMING AND USING CONTENT IN OTHER SYSTEMS