Title:
EXCHANGEABLE ELECTRON GUN FOR ELECTRON MICROSCOPE AND ELECTRON MICROSCOPE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2018/093157
Kind Code:
A1
Abstract:
The present invention relates to an electron gun which maintains a vacuum by sealing a vacuum exhaust line connection portion after vacuum evacuation and comprising a getter in the electron gun and which is exchangeable, and an electron microscope comprising the same, wherein the vacuum is maintained by the vacuum exhaust line connection portion being sealed after vacuum evacuation and the getter is provided in the electron gun, the electron gun for an electron microscope can be easily replaced by being capable of detaching from an electron beam column, and it is economical since the electron gun constitutes an electron microscope together with an electron beam optical system or can be used as a replacement for an electron gun of an existing electron microscope.
Inventors:
CHO BOK LAE (KR)
Application Number:
PCT/KR2017/012981
Publication Date:
May 24, 2018
Filing Date:
November 16, 2017
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
H01J37/06; H01J3/02; H01J37/26
Foreign References:
| JP2006294481A | 2006-10-26 | |||
| KR20080096767A | 2008-11-03 | |||
| KR20070050457A | 2007-05-15 | |||
| KR20160103034A | 2016-08-31 | |||
| KR20150133318A | 2015-11-30 |
Attorney, Agent or Firm:
MOON, Hwan-Goo (KR)
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