Title:
EXHAUST-GAS TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/143193
Kind Code:
A1
Abstract:
The present invention pertains to an exhaust-gas treatment apparatus which burns and detoxifies the exhaust gas discharged from a manufacturing apparatus or the like that manufactures a semiconductor device, a liquid crystal, an LED or the like. In the exhaust-gas treatment apparatus which burns and detoxifies treatment gas, a cylindrical combustion chamber (1) burning the treatment gas is equipped with a combustion nozzle (3A), a susceptible gas nozzle (3B), and a treatment gas nozzle (3C) which inject fuel, susceptible gas, and treatment gas in the tangential direction of the inner peripheral surface of the combustion chamber (1). The combustion nozzle (3A), the susceptible gas nozzle (3B), and the treatment gas nozzle (3C) are located in the same plane perpendicular to the axis of the combustion chamber (1).
Inventors:
MIYAZAKI KAZUTOMO (JP)
KOMAI TETSUO (JP)
SHINOHARA TOYOJI (JP)
KASHIWAGI SEIJI (JP)
KOMAI TETSUO (JP)
SHINOHARA TOYOJI (JP)
KASHIWAGI SEIJI (JP)
Application Number:
PCT/JP2015/081332
Publication Date:
September 15, 2016
Filing Date:
November 06, 2015
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
F23G7/06; F23C3/00; F23L1/00; F23M5/08
Foreign References:
| JP2002106825A | 2002-04-10 | |||
| JP2014190683A | 2014-10-06 | |||
| JP2007519878A | 2007-07-19 | |||
| JPH09229346A | 1997-09-05 | |||
| JPS4213072B1 | 1967-07-26 | |||
| JP2004093116A | 2004-03-25 |
Other References:
See also references of EP 3270058A4
Attorney, Agent or Firm:
WATANABE, Isamu et al. (JP)
Isamu Watanabe (JP)
Isamu Watanabe (JP)
Download PDF: