Title:
EXTREME ULTRAVIOLET LASER MARKING Fθ SHOT AND LASER PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/067085
Kind Code:
A1
Abstract:
An extreme ultraviolet laser marking Fθ shot and a laser processing device. The shot comprises a first lens (L1), a second lens (L2), a third lens (L3) and a fourth lens (L4) successively coaxially arranged along a transmission direction of an incident laser. The first lens (L1) is a biconcave negative lens; the second lens (L2) is a falcate negative lens; the third lens (L3) is a falcate positive lens; and the fourth lens (L4) is a biconvex positive lens; and an intermediate part of the second lens (L2) and the third lens (L3) are both convex toward a transmission direction of the laser. A proportion of the refractive index of the first, the second, the third and the fourth lenses to the abbe number is 1.476/68, with a tolerance of 5%. By means of the design of the four lenses and relative positions therebetween, astigmatism and distortion are effectively corrected, and the focusing degree of the energy is high. Imaging and marking of high quality are realized; imaging quality is improved, and the structure of the shot is simple, which is convenient for designing and appropriate for various laser processing devices.
Inventors:
LI JIAYING (CN)
ZHOU CHAOMING (CN)
GAO YUNFENG (CN)
ZHOU CHAOMING (CN)
GAO YUNFENG (CN)
Application Number:
PCT/CN2012/083801
Publication Date:
May 08, 2014
Filing Date:
October 31, 2012
Export Citation:
Assignee:
HANS LASER TECHNOLOGY CO LTD (CN)
HANS CNC SCIENCE & TECHNOLOGY CO LTD (CN)
HANS CNC SCIENCE & TECHNOLOGY CO LTD (CN)
International Classes:
G02B13/14; B23K26/38; G02B9/34
Foreign References:
DE202012003080U1 | 2012-05-31 | |||
CN102262282A | 2011-11-30 | |||
CN101846790A | 2010-09-29 | |||
US6597521B2 | 2003-07-22 |
Other References:
See also references of EP 2919053A4
Attorney, Agent or Firm:
SHENZHEN ZHONGYI PATENT AND TRADEMARK OFFICE (CN)
深圳中一专利商标事务所 (CN)
深圳中一专利商标事务所 (CN)
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