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Patent Searching and Data


Title:
FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/019730
Kind Code:
A1
Abstract:
Provided is a film forming device comprising a DMS target and a power source for film forming, said device being capable of pre-sputtering the target by using the power source for film forming. The film forming device comprises: a film forming chamber (10); first and second cathodes (20A, 20B) which each have a target (24), and are disposed adjacent to one another and in positions in which target surfaces (24a) are both orientated towards a base material inside the film forming chamber (10); magnetic field formation units (30) which form magnetic fields in the vicinity of the surfaces (24a) of both of the targets (24); the power source (40) for film forming which is connected to both of the cathodes (20A, 20B); and a shutter (50). The shutter (50) performs an opening/closing operation between: a closed position in which the shutter (50) is interposed between the base material and both of the cathode target surfaces (24a), and the target surfaces (24a) are collectively shielded from the base material; and an open position which allows film forming on the base material by opening the space between the target surfaces (24a) and the base material.

Inventors:
HIROTA SATOSHI
Application Number:
PCT/JP2014/066817
Publication Date:
February 12, 2015
Filing Date:
June 25, 2014
Export Citation:
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Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/34
Foreign References:
JPH06179967A1994-06-28
JP2000038663A2000-02-08
JP2008127610A2008-06-05
JP2013124405A2013-06-24
JP2010507728A2010-03-11
Other References:
See also references of EP 3031946A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
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