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Patent Searching and Data


Title:
FILTER HAVING SCANDIUM-DOPED ALUMINUM NITRIDE AS PIEZOELECTRIC LAYER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/161135
Kind Code:
A1
Abstract:
The present invention relates to a filter comprising a plurality of bulk acoustic resonators. Each bulk acoustic resonator comprises a piezoelectric layer; the piezoelectric layer is scandium-doped aluminum nitride; the doping concentration of scandium is within a range of 10%-14%. The filter is a filter of a frequency band Band1, the thickness range of the piezoelectric layer is within a range from 0.503 μm to 0.696 μm at a transmitting end of the filter, and the thickness range of the piezoelectric layer is within a range from 0.439 μm to 0.647 μm at a receiving end of the filter; or the filter is a filter of a frequency band Band3, the thickness range of the piezoelectric layer is within a range from 0.542 μm to 0.759 μm at the transmitting end of the filter, and the thickness range of the piezoelectric layer is within a range from 0.519 μm to 0.72 μm at the receiving end of the filter. The present invention also relates to an electronic device comprising the filter.

Inventors:
XU YANG (CN)
PANG WEI (CN)
LI CONGCONG (CN)
Application Number:
PCT/CN2022/070611
Publication Date:
August 04, 2022
Filing Date:
January 07, 2022
Export Citation:
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Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02
Foreign References:
CN111262543A2020-06-09
CN111342799A2020-06-26
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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