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Patent Searching and Data


Title:
FINE PATTERN MOLDING METHOD, IMPRINT MOLD MANUFACTURING METHOD, IMPRINT MOLD, AND OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/080372
Kind Code:
A1
Abstract:
Provided are: a molding method for forming a fine pattern where directions and positions are controlled for predetermined positions of a to-be-molded object; an imprint mold manufacturing method using the same; an imprint mold; and an optical device. The present invention includes: a first mask pattern formation step for, through imprinting, forming a first mask pattern 31 for forming a fine pattern 21, on a surface including an area of a to-be-molded object 2, where at least the fine pattern 21 is not formed; a second mask pattern formation step for forming a resist film 4 on the to-be-molded object 2 and the first mask pattern 31, exposing the resist film to light with light irradiation performing development of the resist film, to form a second mask pattern 41 so as to expose an area in which the fine pattern 21 is not formed but the first mask pattern 31 is formed; and a fine pattern formation step for etching the to-be-molded object 2 to form the fine pattern 21. The first mask pattern formation step, the second mask pattern formation step, and the fine pattern formation step are repeated in this order.

Inventors:
TANABE DAIJI (JP)
AWAYA NOBUYOSHI (JP)
TANAKA SATORU (JP)
Application Number:
PCT/JP2019/040525
Publication Date:
April 23, 2020
Filing Date:
October 15, 2019
Export Citation:
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Assignee:
SCIVAX CORP (JP)
International Classes:
H01L21/027; B29C33/38; G03F7/20; G03F9/00
Foreign References:
JP2008247022A2008-10-16
JP2008296579A2008-12-11
JP2009177146A2009-08-06
JP2007230229A2007-09-13
Other References:
YAMAZAKI, TOMOHIRO ET AL.: "Four-Directional Pixel-Wise Polarization CMOS Image Sensor Using Air-Gap Wire Grid on 2. 5- ยต m Back-Illuminated Pixels", 2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 3 December 2016 (2016-12-03), pages 1 - 4, XP033054942, ISSN: 2156-017X
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
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