Title:
FINGERPRINT RECOGNITION MODULE AND METHOD FOR FORMING SAME
Document Type and Number:
WIPO Patent Application WO/2021/203732
Kind Code:
A1
Abstract:
Provided are a fingerprint recognition module and a method for forming same. The method for forming the fingerprint recognition module comprises: providing a substrate (100) with a signal processing circuit; forming a discrete sacrificial layer (120) on the substrate (100); forming a planarization layer (130), wherein the planarization layer (130) covers the sacrificial layer (120) and the substrate (100) exposed by the sacrificial layer (120); forming a piezoelectric transducer (140) on the planarization layer (130), wherein the piezoelectric transducer (140) comprises a first electrode (141), a piezoelectric layer (142) located on the first electrode (141), and a second electrode (143) located on the piezoelectric layer (142); forming a release hole (200) which penetrates the planarization layer (130) and exposes part of the top of the sacrificial layer (120); and using an ashing process to remove the sacrificial layer (120) by means of the release hole (200) to form a cavity (300). The sacrificial layer (120) is removed by using the ashing process, and correspondingly, the sacrificial layer (120) can be released under gas phase conditions, thereby facilitating a reduction in the residue of the sacrificial layer (120), and easily removing the sacrificial layer (120) completely. The process for removing the sacrificial layer (120) has little influence on the piezoelectric transducer (140), thereby facilitating a reduction in the process cost, and realizing mass production of the fingerprint recognition module.
Inventors:
SHI HU (CN)
LIU MENGBIN (CN)
XIANG YANGHUI (CN)
LIU MENGBIN (CN)
XIANG YANGHUI (CN)
Application Number:
PCT/CN2020/137214
Publication Date:
October 14, 2021
Filing Date:
December 17, 2020
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORP (CN)
International Classes:
B81C1/00; G06K9/00; H03H3/02; H03H9/17
Foreign References:
| CN108363950A | 2018-08-03 | |||
| CN102556943A | 2012-07-11 | |||
| CN108121976A | 2018-06-05 | |||
| CN110427822A | 2019-11-08 | |||
| US20170322292A1 | 2017-11-09 |
Attorney, Agent or Firm:
INTEBRIGHT LLP (CN)
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