Title:
FLOW ADJUSTMENT VALVE, PUMP UNIT, AND SURFACE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/059989
Kind Code:
A1
Abstract:
In order to adjust the flow of a fluid with high precision, a flow adjustment valve (150) is provided with: a flow path (151) that has an opening (152) formed at one end thereof, and through which the fluid flows; a rising/lowering valve (153) that is capable of covering the entirety of the opening (152) so as to close the opening (152), capable of opening the opening (152) by separating from the opening (152) in the opening direction of the opening (152), and capable of changing the flow area (DA) with respect to the opening (152) by changing the distance (d) from the opening (152) in the opening direction; and a servo actuator (160) that is a driving means for moving the rising/lowering valve (153) in the opening direction on the basis of a predetermined detection value.
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| WO/2016/204203 | GATE VALVE |
Inventors:
KURIHARA YOSHIAKI (JP)
NAMBA TAKESHI (JP)
FUKUYAMA SATOSHI (JP)
NOSE KOICHI (JP)
NAMBA TAKESHI (JP)
FUKUYAMA SATOSHI (JP)
NOSE KOICHI (JP)
Application Number:
PCT/JP2020/034202
Publication Date:
April 01, 2021
Filing Date:
September 09, 2020
Export Citation:
Assignee:
SHIBAURA MACHINE CO LTD (JP)
International Classes:
F16K51/02; F16K1/00; C23C14/34; C23C14/50; C23C14/54; F04D19/04; G05D7/06; H05H1/46
Foreign References:
| US20160372347A1 | 2016-12-22 | |||
| JP2007211696A | 2007-08-23 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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