Title:
FLOW RATE CONTROL DEVICE, FLOW RATE CONTROL DEVICE CONTROL METHOD, AND FLOW RATE CONTROL DEVICE CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/166997
Kind Code:
A1
Abstract:
[Abstract] [Problem] To obtain a flow rate control device which rapidly adjusts a flow rate to a set flow rate. [Solution] A flow rate control device (1) which controls the flow rate of a fluid supplied to a controlled object to maintain the inside of the controlled object at a flow rate set value is provided with: a measured value acquiring unit (13) for acquiring a measured value obtained by a flow-rate sensor (102) which measures the flow rate of the fluid; a set value acquiring unit (11) for acquiring the flow rate set value of the fluid; an adjusted value determining unit (12) for determining a flow rate adjusted value different from the flow rate set value; and a drive control unit (40) for controlling the flow rate of the fluid by adjusting the opening degree of a valve (105) that supplies the fluid to the controlled object, in such a way as to reduce the difference between the measured value and the flow rate adjusted value.
Inventors:
KANAI YOSHITOMO (JP)
NOZAWA TAKAHIRO (JP)
NOZAWA TAKAHIRO (JP)
Application Number:
PCT/JP2021/006096
Publication Date:
August 26, 2021
Filing Date:
February 18, 2021
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Foreign References:
| JP2018206387A | 2018-12-27 | |||
| JP2014059609A | 2014-04-03 | |||
| JPH09217898A | 1997-08-19 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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