Title:
FOCAL POSITION ESTIMATION SYSTEM, FOCAL POSITION ESTIMATION METHOD, FOCAL POSITION ESTIMATION PROGRAM, SEMICONDUCTOR INSPECTION SYSTEM AND BIOLOGICAL OBSERVATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/002679
Kind Code:
A1
Abstract:
In the present invention, the estimation of a focal position based on an image is prepared in a short amount of time. A focal position estimation system 30 is a system that estimates a focal position when focusing on an estimation target image, the system comprising: an estimation target image acquisition unit 31 that acquires an estimation target image; and a focal position estimation unit 32 that outputs a feature amount of an estimation target image from the estimation target image using a feature amount output model and that estimates the focal position in focus corresponding to the estimation target image from the output feature amount. The feature output model is generated by machine learning from a plurality of training images to which focal position information pertaining to the focal position at the time of imaging is associated. The feature amounts of two training images are compared according to the focal position information associated with the two different training images, and machine learning is performed on the basis of the comparison results.
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Inventors:
ITO AKARI (JP)
TAKESHIMA TOMOCHIKA (JP)
TAKESHIMA TOMOCHIKA (JP)
Application Number:
PCT/JP2022/010693
Publication Date:
January 26, 2023
Filing Date:
March 10, 2022
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B21/36; G02B7/28; G03B13/36; G06T7/00
Domestic Patent References:
| WO2020104521A2 | 2020-05-28 | |||
| WO2007139201A1 | 2007-12-06 | |||
| WO2020071499A1 | 2020-04-09 | |||
| WO2015107927A1 | 2015-07-23 | |||
| WO2019181053A1 | 2019-09-26 |
Foreign References:
| JP2020060602A | 2020-04-16 | |||
| JP2021140032A | 2021-09-16 | |||
| JPH09311102A | 1997-12-02 | |||
| JP2013050713A | 2013-03-14 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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