Title:
FOREIGN MATTER REMOVAL DEVICE AND FOREIGN MATTER REMOVAL METHOD
Document Type and Number:
WIPO Patent Application WO/2022/064950
Kind Code:
A1
Abstract:
In order to obtain a foreign matter removal device capable of improving foreign matter removal performance irrespective of the construction of a structure formed on the surface of an object, a foreign matter removal device for removing foreign matter adhering to an object by using a gas blown out from a nozzle in which an air outlet is formed was configured so that the aperture ratio of both ends of the air outlet is less than the aperture ratio of the central portion of the air outlet.
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Inventors:
NAKAMURA TAKANORI (JP)
SUGI DAISAKU (JP)
UKI DAISUKE (JP)
KAWANO TAKAHIRO (JP)
KANZAKI TOYOKI (JP)
SUGI DAISAKU (JP)
UKI DAISUKE (JP)
KAWANO TAKAHIRO (JP)
KANZAKI TOYOKI (JP)
Application Number:
PCT/JP2021/031402
Publication Date:
March 31, 2022
Filing Date:
August 26, 2021
Export Citation:
Assignee:
DENSO CORP (JP)
HORIBA LTD (JP)
HORIBA LTD (JP)
International Classes:
B08B3/02; B08B5/00; H01L21/304
Foreign References:
| JP2010210527A | 2010-09-24 | |||
| JP2016201457A | 2016-12-01 | |||
| JPH1070069A | 1998-03-10 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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