Title:
FOREIGN MATTER REMOVAL DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE TREATMENT DEVICE, AND CLEANING MEMBER
Document Type and Number:
WIPO Patent Application WO/2020/149027
Kind Code:
A1
Abstract:
Provided is a foreign matter removal device that removes foreign matter adhered to a work, the foreign matter removal device having a nanopillar structure that has a plurality of nano-sized pillars, and an actuator that brings the nanopillar structure and the work into contact or proximity with one another.
Inventors:
OBO TADASHI (JP)
HIYAMA HIROKUNI (JP)
WADA YUTAKA (JP)
TAKATOH CHIKAKO (JP)
HIYAMA HIROKUNI (JP)
WADA YUTAKA (JP)
TAKATOH CHIKAKO (JP)
Application Number:
PCT/JP2019/046673
Publication Date:
July 23, 2020
Filing Date:
November 28, 2019
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
B08B1/00; B08B3/04; H01L21/304
Foreign References:
JP2008288517A | 2008-11-27 | |||
JP2010109225A | 2010-05-13 | |||
JPH10189511A | 1998-07-21 | |||
JP2018160551A | 2018-10-11 | |||
JP2017191827A | 2017-10-19 |
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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