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Title:
GALLIUM OXIDE PREPARATION METHOD AND SYSTEM BASED ON DEEP LEARNING AND HEAT EXCHANGE METHOD
Document Type and Number:
WIPO Patent Application WO/2022/141750
Kind Code:
A1
Abstract:
The present application relates to a gallium oxide preparation method and system based on deep learning and a heat exchange method. A prediction method comprises: obtaining preparation data of a gallium oxide single crystal, the preparation data comprising seed crystal data, environmental data and control data, and the control data comprising a seed crystal cooling medium flow rate; preprocessing the preparation data to obtain preprocessed preparation data; and inputting the preprocessed preparation data into a trained neural network model to obtain predicted property data corresponding to the gallium oxide single crystal. Firstly, the preparation data is preprocessed to obtain the preprocessed preparation data, the preprocessed preparation data is input into the trained neural network model to obtain the predicted property data corresponding to the gallium oxide single crystal, and then the performance of the gallium oxide single crystal is predicted by means of the trained neural network model. The preparation data can be adjusted to obtain desired performance of the gallium oxide single crystal, such that the performance of the gallium oxide single crystal is optimized.

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Inventors:
QI HONGJI (CN)
CHEN DUANYANG (CN)
Application Number:
PCT/CN2021/075545
Publication Date:
July 07, 2022
Filing Date:
February 05, 2021
Export Citation:
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Assignee:
HANGZHOU FUJIA GALLIUM TECH CO LTD (CN)
International Classes:
G06Q10/04; C30B11/00; C30B29/16; G06N3/04; G06N3/08; H01L21/66; H01L21/67
Domestic Patent References:
WO2020204381A12020-10-08
Foreign References:
CN107541776A2018-01-05
CN109487334A2019-03-19
CN111485288A2020-08-04
CN103541008A2014-01-29
CN111512324A2020-08-07
US20170362738A12017-12-21
JP2006273684A2006-10-12
Other References:
KYEONG K. LEE, TERENCE BROWN, GEORGIANNA DAGNALL, ROBERT BICKNELL-TASSIUS, APRIL BROWN, GARY S. MAY: "Using Neural Networks to Construct Models of the Molecular Beam Epitaxy Process", IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, vol. 13, no. 1, 1 February 2000 (2000-02-01), US , pages 1 - 12, XP011055800, ISSN: 0894-6507
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY(SHENZHEN) (CN)
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