GAP-MAINTAINING METHOD, GAP-MAINTAINING DEVICE, AND COATING DEVICE

WIPO Patent Application WO/2015/141456

A1

A coating device (1) comprising a coating apparatus (5) that coats a substrate (W) with a coating liquid, wherein a gap between the substrate (W) and a discharge port (7a) of the coating apparatus (5) can be kept uniform with high precision and coating can be performed while preventing the occurrence of control operation delays. This gap-maintaining method involves measuring a gap that is formed between: an end part of a reference surface (17) of a protective block (16) provided further towards a pre-coating side of the substrate (W) than the discharge port (7a); and a section, which opposes the end part, of a surface (K) to be coated of the substrate (W). Subsequently, as the section, which was opposing the end part, of the surface (K) to be coated reaches a position opposing the discharge port (7a) as a result of the substrate (W) moving, a gap formed between the discharge port (7a) and the section of the surface (K) to be coated maintains uniformity due to the coating apparatus (5) being moved in the direction orthogonal to the surface (K) to be coated and on the basis of the measured gap.

ABE TETSUYA (JP)
SHISHINO KAZUYUKI (JP)
KITAMURA YOSHIYUKI (JP)
ENZAKI SATOSHI (JP)

PCT/JP2015/056171

September 24, 2015

March 03, 2015

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TORAY ENG CO LTD (JP)
TORAY INDUSTRIES (JP)

B05D3/00; B05C5/02; B05C11/00; B05D1/26

WO2013080841A1

2013-06-06

JP2005246274A	2005-09-15
JP2004298697A	2004-10-28
JP2007105623A	2007-04-26
JP2013148408A	2013-08-01
JP2006073872A	2006-03-16
JP2013128916A	2013-07-04
JPH10421A	1998-01-06

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