Title:
GAS BARRIER FILM AND WAVELENGTH CONVERSION SHEET
Document Type and Number:
WIPO Patent Application WO/2022/064895
Kind Code:
A1
Abstract:
The gas barrier film according to one aspect of the present disclosure is formed by layering, in order, a base material, a first AlOx vapor deposition layer, a gas barrier intermediate layer, a second AlOx vapor deposition layer, and a gas barrier coating layer. The first AlOx vapor deposition layer and the second AlOx vapor deposition layer are each no more than 15 nm thick, the gas barrier intermediate layer and the gas barrier coating layer are each 200–400 nm thick, and the composite modulus of elasticity of the gas barrier coating layer as measured by nanoindentation is 7–11 GPa at a measurement temperature of 25°C and 5–8 GPa at a measurement temperature of 60°C.
Inventors:
FUKUGAMI MIKI (JP)
YASUTAKE SHIGEKAZU (JP)
FURUTA KAORU (JP)
YASUTAKE SHIGEKAZU (JP)
FURUTA KAORU (JP)
Application Number:
PCT/JP2021/029913
Publication Date:
March 31, 2022
Filing Date:
August 16, 2021
Export Citation:
Assignee:
TOPPAN INC (JP)
International Classes:
B32B9/00; B32B7/022; C23C14/08; C23C14/58; G02B5/20; H01L51/50; H05B33/04
Domestic Patent References:
| WO2020085466A1 | 2020-04-30 |
Foreign References:
| JP2017177685A | 2017-10-05 | |||
| JP2009154449A | 2009-07-16 | |||
| JP2020026105A | 2020-02-20 | |||
| JP2019188721A | 2019-10-31 | |||
| JP2007168085A | 2007-07-05 | |||
| JP2010201628A | 2010-09-16 | |||
| JP2008073993A | 2008-04-03 | |||
| JP2020126152A | 2020-08-20 | |||
| JP2020029095A | 2020-02-27 | |||
| JP2021041620A | 2021-03-18 |
Other References:
See also references of EP 4219144A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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