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Title:
GERMANIUM DISSOLUTION INHIBITOR
Document Type and Number:
WIPO Patent Application WO/2019/181269
Kind Code:
A1
Abstract:
[Problem] The purpose of the present invention is to solve the contradictory problems of suppressing etching while maintaining the grinding speed during germanium grinding. [Solution] This germanium dissolution inhibitor comprises a compound having: an acidic functional group or a residue thereof; and a basic functional group or a residue thereof.

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Inventors:
YAMAZAKI AYANO (JP)
ONISHI SHOGO (JP)
Application Number:
PCT/JP2019/004675
Publication Date:
September 26, 2019
Filing Date:
February 08, 2019
Export Citation:
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Assignee:
FUJIMI INC (JP)
International Classes:
H01L21/304; B24B1/00; B24B37/00; C09K3/14
Domestic Patent References:
WO2011093223A12011-08-04
Foreign References:
JP2017531311A2017-10-19
JP2017101236A2017-06-08
JP2017527104A2017-09-14
JP2015118125A2015-06-25
EP2554613A12013-02-06
US20150129795A12015-05-14
JP2014529183A2014-10-30
Attorney, Agent or Firm:
HATTA & ASSOCIATES (JP)
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