Title:
GRINDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/065111
Kind Code:
A1
Abstract:
This grinding device comprises a chuck, a casing, a tool driving unit, a nozzle, a sensor, and a sensor cover. The chuck retains a substrate. The casing houses the chuck. The tool driving unit drives a grinding tool that is pressed against the substrate inside the casing. The nozzle supplies a grinding liquid to the substrate inside the casing. The sensor is positioned inside the casing, and detects the liquid surface level of liquid collected inside the casing. The sensor cover is positioned between the chuck and the sensor.
Inventors:
KODAMA MUNEHISA (JP)
Application Number:
PCT/JP2021/033569
Publication Date:
March 31, 2022
Filing Date:
September 13, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B24B55/06; B23Q11/08; B24B7/04; B24B49/12; B24B55/02; H01L21/304
Foreign References:
| JP2013188813A | 2013-09-26 | |||
| JP5878613B2 | 2016-03-08 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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