TITLE: HEATABLE LOW-E GLAZING COMPRISING TWO LAYERS BASED ON TITANIUM NITRIDE

The invention relates to low emissivity insulating glazing, provided with stacks comprising thin "functional" layers (presently based on titanium nitride), that is to say acting on solar and/or thermal radiation essentially by reflection and/or absorption of near infrared (solar) or far infrared (thermal) radiation. The application more particularly targeted by the invention is, firstly, vehicle glazings, such as side windows, sunroofs or rear windows. Without departing from the context of the invention, the present glazing can also be used in the field of the construction industry, as solar control glazing. "Functional" or also "active" layer is understood to mean, within the meaning of the present patent application, the layers of the stack which confer, on the stack, the bulk of its thermal insulation properties. Generally, stacks made of thin layers equipping the glazing confer on it substantially improved insulation properties very essentially by the intrinsic properties of said active layers. Said layers act on the stream of thermal infrared radiation passing through said glazing, in contrast to the other layers, generally made of dielectric material and generally mainly having the function of chemical or mechanical protection of said functional layers. Dielectric material is understood to mean a material, the bulk impurity-free form of which exhibits a high resistivity, for example a resistivity of greater than 10 ¹⁰ ohms. meters (W . m) at 25°C.

Such glazings provided with stacks of thin layers act on the incident solar radiation either essentially by absorption of the incident radiation by the functional layer(s) or essentially by reflection by these same layers.

They are grouped together under the designation of solar control glazing. They are commercially available and used essentially:

- either to provide essentially protection of the passenger compartment (motor vehicle) or of the dwelling from solar radiation and to prevent overheating thereof, such glazings being described in the industry as solar protection glazings, - or essentially to provide thermal insulation of the dwelling and to prevent losses of heat, these glazings being described as insulating glazings.

Thermal insulation glazing is understood to mean a glazing provided with at least one functional layer conferring on it a reduced energy loss, said layer exhibiting properties of reflecting IR radiation of between 5 and 50 micrometers. The functional layers used in this function exhibit a high IR radiation reflection coefficient and are said to be low-emissive (or low-e). In application, such as the motor vehicle industry, it is often desired to limit the amount of heat entering the passenger compartment of the vehicle, that is to say to limit the energy transmission of the solar radiation through the glazing. A conventional parameters used in the field to evaluate this capability is the normal emissivity e _h of the glazing as calculated in the standard ISO 10292 (1994), Annex A.

Generally, all the light and thermal characteristics presented in the present description are obtained according to the principles and methods described in the international standards ISO 9050 (2003) and ISO 10292 (1994), respectively relating to the determination of the light and energy characteristics of the glazings used in glass for the construction industry.

Glazings additionally providing improved visual comfort, in particular in the motor vehicle field (as side window, rear window or also as sunroof), are currently sought in particular. One of the objects of the present invention, in order to respond to such a demand, is to provide suitable glazing which allows the passengers of the vehicle or the occupants of the building not to be or to be hardly visible from the outside in the light of the day but to be able on their side to see, without any bother, the external environment. Such a glazing comprises from the outside a first glass substrate, preferably tinted in its bulk, bonded to a second substrate by an intermediate thermoplastic sheet, in particular made of PVB which can also be tinted, said second substrate being made preferably of clear glass and provided with said stack of layers preferably positioned on its face exposed toward the inside of the car compartment. From this requirement, a light transmission comprised between 20 and 40% for a constitution article made of a clear glass coated with the present stack of layers is needed by the current market to get a final laminated glazing with a light transmission below 10%. Moreover, a low light reflection of the constitution article made of a clear glass coated with the present stack of layers is also required, notably below 10% preferably around or below 5%, as measured on the side of the article where said stack is deposited.

Another essential characteristic of a glazing is its capability to withstand heat treatments and more particularly bending, more particularly in the vehicle glazings field.

Such ability is usually measured first of all by the appearance (or rather the absence) of physical damages after such treatment, such as cracks appearing in the coating and highly visible to vehicle passengers.

Another criterion is also the ability of the glazing which has undergone said heat treatment to maintain (or even improve) its thermal insulation properties, as measured by the normal emissivity described above.

The most effective stacks currently sold to solve the preceding complex problems are often deposited by magnetron sputtering techniques and incorporate a metal layer of the silver type operating essentially on the mode of the reflection of a major part of the incident IR (infrared) radiation. These stacks are thus used mainly as glazings of the low-emissive (or low-e) type for the thermal insulation of buildings and also vehicles. However, these layers are very sensitive to moisture which explained that they can hardly be used on a single glazing and are thus mainly used in double glazings or laminated glazing, on face 2 or 3 thereof, in order to be protected from moisture. The stacks according to the invention do not comprise such layers of the silver type, or indeed of the gold or platinum or indeed copper type. More generally, the stacks according to the invention do not contain such precious metals, or else in very negligible amounts, in particular in the form of unavoidable impurities. Other insulating glazing based on stacks with titanium nitride or titanium oxynitride as the functional layer(s) have been proposed, using silicon nitride as the dielectric layers above, upon and between said functional layers, for example in publications WO201 9/002737 or US10294147B2. However, the experiments made by the applicant, as reported below, showed that the coating of such glazing exhibits cracks when they undergo a heat treatment like a bending, as currently operated in the technical field of the present application.

The development of novel and adapted stacks is then made necessary by certain specific applications or arrangements. According to the results obtained by the applicant company, the above problems have been solved by glass articles and glazing as described now.

According to a first aspect, the present invention relates to a glass article with solar control properties, more particularly useful for the manufacturing of vehicle glazing such as car roofs or for the manufacturing of architectural glazing for buildings, comprising at least one glass substrate provided with a stack of layers, wherein the stack comprises successively from the surface of said substrate: a first module Mi consisting of layer(s) comprising dielectric material, and preferably based on dielectric material, a first layer TiNi comprising titanium nitride, a second module M2 consisting of layer(s) comprising dielectric material, and preferably based on dielectric material, a second layer T1N2 comprising titanium nitride, a third module M3 consisting of layer(s) comprising dielectric material, and preferably based on dielectric material, wherein the cumulative sum of the thicknesses of the T1N1 and T1N2 layers comprising titanium nitride is between 25 and 60 nm, wherein the third module M3 comprises a layer comprising an oxide of silicon or an oxynitride of silicon having a thickness greater than 10 nm, and wherein an interlayer IL of titanium, aluminum, silicon, an alloy of at least two of these elements, or of a nickel chromium alloy, is deposited between said second layer TΊN2 and said third module M3, the thickness of said interlayer IL being between 0,5 nm and 7 nm.

More particularly the invention relates to a glass article, in particular a vehicle or building glazing with solar control properties, comprising at least one glass substrate provided with a stack of layers, wherein the stack comprises successively from the surface of said substrate:

- a first module Mi comprising a layer based on a dielectric material of thickness ti or a set of layers based on dielectric materials of cumulative thickness ti,

- a first T1N1 layer comprising titanium nitride, with a thickness of between 10 nanometers and 30 nanometers,

- a second module M2 comprising a layer based on a dielectric material of thickness t2 or a set of layers based on dielectric materials of cumulative thickness t2,

- a second T1N2 layer comprising titanium nitride with a thickness of between 10 nanometers and 30 nanometers, - a third module M3 comprising a layer based on a dielectric material of thickness t3 or a set of layers based on dielectric materials of cumulative thickness ts, wherein the cumulative sum of the thicknesses of the T1N1 and T1N2 layers comprising titanium nitride is between 25 and 60 nm, wherein the third module M3 comprises a layer comprising an oxide or oxynitride of silicon having a thickness greater than 10 nm, preferably greater than 20 nm, and wherein an interlayer IL of titanium, aluminum, silicon, an alloy of at least two of these elements, or of a nickel chromium alloy, is deposited between said second layer T1N2 and said third module M3, the thickness of said interlayer IL being between 0,5 nm and 7 nm, preferably between 1 nm and 6 nm.

It has been discovered that such articles made it possible effectively to solve the technical problem described above.

Preferred embodiments of the present invention are reported in the attached claims, which can, of course and if appropriate, be combined one with another. According to other preferred embodiments but not all reported in the claims:

- The cumulative thickness T1N1 + T1N2 of the first layers based on titanium nitride and second layer based on titanium nitride is less than 50 nm, preferably is less than 45 nm.

- The ratio of the thicknesses tiita is less than 0.55. - The thickness T1N1 of the first layer based on titanium nitride is of between 15 nm and 25 nanometers, limits included.

- The thickness T1N2 of the second layer based on titanium nitride is of between 15 nm and 25 nanometers, limits included.

- the thickness h of the first module Mi is between 1 nm and 50 nanometers, including boundaries,

- The thickness ti of the first module Mi is less than 25 nm, in particular of between 1 nm and 25 nanometers, limits included, preferably between 4 nm and 20 nanometers, limits included.

The thickness t2 of the second module M2 is between 20 nm and 100 nm including boundaries,

- The thickness t _å of the second module M2 is of between 20 nm and 100 nm, limits included, preferably is of between 25 nm and 80 nm, limits included.

- The thickness t3 of the third module M3 is of between 20 nm and 65 nanometers, limits included, preferably is of between 25 nm and 60 nanometers, limits included, and very preferably is of between 30 nm and 50 nanometers, limits included.

- The coating does not contain a layer based on silver or on gold.

- The coating does not contain a layer based on a transparent conductive layer (TCO) such as ITO or Sn02:F.

- Mi consists of a single layer based on a dielectric material.

- Mi includes and more preferably is a single layer comprising silicon nitride or silicon oxide, preferably based on silicon nitride or on silicon oxide and more preferably is a single layer comprising or based on silicon nitride.

- M2 is a single layer comprising or based on a single dielectric material, preferably chosen from silicon oxide or silicon oxynitride, preferably comprising or based on silicon dioxide.

- M2 is a set of layers made of dielectric materials, including preferably a layer comprising or based on a material chosen from silicon oxide or silicon oxynitride.

- M2 includes at least a layer comprising silicon nitride and a layer comprising silicon oxide, interlayer(s) IL being deposited between a titanium nitride layer and the layer comprising silicon oxide.

- M2 is a set of layers made of dielectric materials, said set being constituted by layer(s) comprising or based on a material chosen from silicon oxide or silicon oxynitride and layer(s) comprising or based on silicon nitride.

- M2 is a set of layers made of dielectric materials, said set being constituted by a first layer comprising or based on silicon nitride, a layer comprising or based on a material chosen from silicon oxide or silicon oxynitride and a second layer comprising or based on silicon nitride.

- The silicon oxynitride-based layers are characterized by a refractive index at 550 nm intermediate between a non-nitrided oxide layer and a non-oxided nitride layer. The silicon oxynitride-based layers preferably have a refractive index at 550 nm greater than 1 .55, 1 .60 or 1 .70 or between 1 .55 and 1.99; 1 .60 and 1 .97; 1.70 and 1 .95 or 1.70 and 1 .90.

- The silicon oxynitride material mentioned above exhibits a molar ratio 0/(0+N) of between 0,94 and 0,25, preferably of between 0,87 and 0,36.

- M3 does not include a layer comprising silicon nitride.

- Mi and M3 are single layers.

- The T1N1 layer has a thickness greater than the T1N2 layer. - The T1N2 layer has a thickness greater than the T1N1 layer

- The thickness of the interlayer(s) IL is of between 1 and 6 nm, more preferably of between 2 and 5 nm, boundaries included.

- The interlayer(s) IL is/are made of titanium, aluminum, silicon, an alloy of at least two of these elements and more preferably are made of titanium.

- The glass substrate on which the stack is deposited is made of clear glass.

- The glazing comprises two glass substrates assembled by a thermoplastic sheet, said glazing being provided with said stack of layers, said stack preferably being positioned on the face of a substrate facing an exterior surface of said glazing.

- The preceding glazing comprises a first glass substrate, preferably tinted in its bulk, bonded to a second substrate by an intermediate thermoplastic sheet, in particular made of PVB, said second substrate being made of clear glass and provided with said stack of layers preferably positioned on its face exposed toward the exterior face of said glazing. Tinted in its bulk is understood to mean that the substrate comprises, in its glass composition, elements targeted at conferring a coloration on it (i.e. different from that of a "clear" glass), in particular elements such as cobalt, iron, selenium, indeed even chromium, which can also be targeted at reducing the light transmission thereof. - Said glass substrate(s) are tempered or bent.

Preferably, the layers of titanium nitride are based on titanium nitride or more preferably are made essentially of titanium nitride.

Titanium-based layers according to the invention comprise, for example, more than 50% by weight of titanium nitride, preferably more than 80% or even more than 90% by weight of titanium nitride.

The titanium nitride according to the invention is not necessarily stoichiometric (Ti/N atomic ratio of 1) but can be over- or sub-stoichiometric. According to an advantageous embodiement, the N/Ti ratio is of between 1 and 1.2. Also, the titanium nitride according to the invention can comprise a minor quantity of oxygen, for example between 1 mol% and 10 mol% of oxygen, in particular between 1 mol% and 5 mol% of oxygen.

According to a particularly preferred form, the titanium nitride layers according to the invention correspond to the general formula TiNxOy, in which 1.00 < x < 1.20 and in which 0.01 < y < 0.10. The dielectric materials, once deposited as thin layers, can, however, comprise additional elements which substantially increase their electrical conductivity, of use, for example, for improving the cathode sputtering yield of the precursor material constituting the magnetron target. Preferably, the modules Mi, M2 and M3 comprise or consist of layer(s) chosen from materials based on silicon nitride, silicon oxynitride and silicon oxide. A material based on silicon nitride, silicon oxide, or silicon oxynitride is, for example, a material made principally, and preferably essentially, of such a compound but which can also nevertheless contain other minority elements, in particular as replacement for the cations, in particular in order to promote the deposition thereof in the form of thin layers by the usual techniques of magnetron sputtering as described above. By way of example, the layers according to the present invention made of silicon nitride or of silicon oxynitride, indeed even of silicon oxide, in particular those deposited by magnetron, generally comprise additional elements such as Al, Zr, B, and the like, in proportions which can range, for example, up to 10 atom%, even sometimes up to 20% or even up to 30 atom%, based on total amount of cations (i.e. atoms other than O and N within said layer).

The glazing according to the invention can be a single glazing comprising a single glass substrate, possibly tinted in its mass, in which the stack of thin layers is positioned on face 2 of the single glazing, the faces of the substrate being numbered from the outside toward the inside of the building or of the passenger compartment which it equips.

According to another embodiment, in particular for use in the motor vehicle field, the glazing according to the invention can be a laminated glazing, comprising two glass substrates assembled by a thermoplastic sheet, said glazing being provided with a stack of layers as is described above. Preferably, the stack is deposited on the face of the substrate facing the interior of the building or of the passenger compartment which it equips.

The glass article described above can very obviously be tempered and/or bent. A process for the manufacture of an article/glazing according to the invention comprises, for example, at least the following stages:

- a glass substrate is introduced into a cathode sputtering device,

- in a first compartment, at least one underlayer of a dielectric material is deposited,

- in a subsequent compartment, a titanium target is sputtered by means of a plasma generated from a nitrogen-comprising gas,

- in a subsequent compartment, at least one intermediate layer of a dielectric material is deposited,

- in a subsequent compartment, a titanium target is sputtered by means of a plasma generated from a nitrogen-comprising gas,

- in a subsequent compartment, at least one overlayer of a dielectric material is deposited.

In addition, where appropriated within the stack, in an intermediate compartment, a metallic target made of of titanium, aluminum, silicon, an alloy of at least two of these elements, or of a nickel chromium alloy is sputtered by means of a plasma generated from argon gas, for the deposition of the above-mentioned IL interlayer.

The terms "underlayer" and "overlayer" refer, in the present description, to the respective positions of said layers with respect to the functional layer(s) in the stack, said stack being supported by the glass substrate. In particular, when the stack contains a single underlayer and a single overlayer, the underlayer is the layer in contact with the glass substrate and the overlayer is the outermost layer of the stack, facing away from the substrate.

The term "interlayer" denotes the layer(s) positioned between two related layers disposed respectively under and over it, one of this related layer being typically a layer comprising titanium nitride.

Thickness of a layer is understood to mean, within the meaning of the present invention, the true geometric thickness of the layer, as can be measured in particular by conventional electron microscopy techniques or another technique.

The coatings according to the current invention are conventionally deposited by deposition techniques of the type of magnetic field-assisted vacuum sputtering of a cathode of the material or of a precursor of the material to be deposited, often known as magnetron sputtering technique in the field. Such a technique is today extensively used and well-known in particular when the coating to be deposited consists of a more complex stack of successive layers of thicknesses of a few nanometers or a few tens of nanometers. The metallic interlayer(s) according to the invention (IL) is/are deposited by the sputtering of a target made of the corresponding metal, in a neutral atmosphere of a noble gas, generally argon. For example, a Ti-made interlayer is deposited by the sputtering of a titanium target in a 100% argon atmosphere. However, it stands possible that part of this interlayer can be partially oxidized or nitrided during the heat treatment process such as a bending or a tempering in the final glazing.

The invention and its advantages are described in more detail below, by means of the non-limiting examples below, which are according to the invention and comparative. In all the examples and the description, unless otherwise specified, the thicknesses given are geometric thicknesses.

All the substrates of the examples are made of clear glass with a thickness of 2 mm of Planiclear type sold by Saint-Gobain Glass France. All the layers are deposited in a known way by magnetic field-assisted cathode sputtering, often called magnetron cathode sputtering as mentioned above.

In a well-known way, the different successive layers are deposited in the successive compartments of the cathode sputtering device, each compartment being provided with a specific metal target made of Si (doped with aluminium) or Ti in the appropriate atmosphere, as chosen for the deposition of a specific layer of the stack. More specifically, the layers of silicon nitride are deposited in compartments of the device from a metallic silicon target (doped with 8% by weight of aluminum), in a reactive atmosphere containing nitrogen mixed with argon. The silicon nitride layers thus also contain aluminum.

More specifically, the layers of silicon oxide are deposited in compartments of the device from the same metallic silicon target (doped with 8% by weight of aluminum), in a reactive atmosphere containing oxygen mixed with argon. The silicon oxide layers thus also contain aluminium.

Thus the skilled one will understand that such layers are said to be based on silicon nitride, or silicon oxide within the meaning of the instant invention. The titanium nitride layers are deposited in other compartments of the device from a pure metallic titanium target in a reactive atmosphere containing exclusively nitrogen and argon.

The titanium interlayers are deposited in compartments of the device from the same pure metallic titanium target in an atmosphere containing exclusively argon. The conditions for magnetron deposition of such layers are technically well known in the field.

In the examples which follow, the glass substrate was thus successively covered with a stack of layers comprising two functional layers made of titanium nitride (denoted TiN subsequently for convenience, even if the actual stoichiometry of the layer is not necessarily this). The first module Mi placed between the glass surface and the first functional layer TiNi is made of of silicon nitride (denoted S13N4 subsequently for convenience, even if the actual stoichiometry of the layer is not necessarily this) for all the examples. Different configurations of the second module M2 and third module 3 were experimented using either silicon nitride or silicon oxide (denoted S1O2 subsequently for convenience, even if the actual stoichiometry of the layer is not necessarily this) to check the capability of the resulting stack to withstand a heating process such as a bending process while providing thermal insulation properties, as a function of the used materials. The deposition conditions were adjusted according to conventional techniques for a magnetron deposition in order to obtain different stacks, the sequence of layers of which and their thicknesses (in nanometers nm) are given in table 1 below, starting from the glass surface: [Table 1]

‘comparative

“according to the invention A-Measurement of the characteristics of the glazings

The thermal and optical characteristics of the glass articles thus obtained were measured according to the following principles and standards:

1 °) Optical properties: The measurements are carried out in accordance with the European standard ISO 9050 (2003). More specifically, the light transmission TL and the light reflection on the side of the stack RLC are measured between 380 and 780 nm according to the illuminant Des.

2°) Thermal properties: The thermal insulation properties of the glass articles are evaluated by determination of the emissivity at normal incidence e measured on the interior face of the substrate covered with the stack of layers, according to the conditions described in the standard ISO 10292 (1994), Annex A, before and after the thermal bending process. The light transmission TL, reflection RLC and normal emissivity e _h values (in percentages) are measured for the glazing provided with the stack.

B-Results

The results obtained for the monolithic glass article according to the examples described above are grouped together in table 2, which follows:

[Table 2]

It is observed that such glass article obtained according to the invention exhibit a low light reflection (less than 10%) without, however, the light transmission being excessively high (around 20 to 25%). Such characteristics make possible the insertion of such glass articles as a part of glazings such as sunroofs as required by the market, that is suitable for a use making possible an unobstructed view of the outside of the vehicle for the occupants of the vehicle or of the building equipped with such glazings.

The article according to the comparative example 1 (according to the previously cited prior art) does not withstand the applied heat treatment as indicated by the very high number of cracks observed. However, its energy insulation performance is acceptable, as indicated by the low emissivity value. The glazing according to the comparative examples 2 and 3, in which some silicon nitride layer(s) have been replaced by other(s) of silicon oxide, has better resistance to the heat treatment but degraded thermal insulation properties.

By comparison, examples 4 to 6 according to the invention present the best compromise between the resistance to heat treatment and the thermal insulation performance. In particular, examples 5 and 6 exhibit emissivity values comparable to those obtained for the stacks of the prior art (see example 1), but no cracks after the bending process.