Title:
HOLDING TOOL AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/065897
Kind Code:
A1
Abstract:
Proposed is a holding tool which has a flexural modulus of 50 GPa or greater in a circumferential direction, and which satisfies the property of having warpage of 0.5 mm or less. The holding tool is formed using carbon fiber and resin, has a substantially annular shape, and is provided with a first resin layer. In the first resin layer, the longitudinal direction of the fiber follows along the circumferential direction of the substantially annular shape.
Inventors:
NISHIHARA YUSAKU (JP)
MURATA CHISATO (JP)
HASUIKE YUHEI (JP)
HIROOKA NOBUKI (JP)
MURATA CHISATO (JP)
HASUIKE YUHEI (JP)
HIROOKA NOBUKI (JP)
Application Number:
PCT/JP2020/036861
Publication Date:
April 08, 2021
Filing Date:
September 29, 2020
Export Citation:
Assignee:
FUDOW COMPANY LTD (JP)
International Classes:
H01L21/301
Domestic Patent References:
| WO2016167136A1 | 2016-10-20 |
Foreign References:
| JP2007222998A | 2007-09-06 | |||
| JP2000301451A | 2000-10-31 | |||
| JP2016531020A | 2016-10-06 | |||
| JP6511577B1 | 2019-05-15 | |||
| JP2008300555A | 2008-12-11 | |||
| JP2013106021A | 2013-05-30 | |||
| JP2017220628A | 2017-12-14 | |||
| JP2000301451A | 2000-10-31 | |||
| JP4894982B1 | 2012-03-14 |
Attorney, Agent or Firm:
MAEJIMA Daigo et al. (JP)
Download PDF: