Title:
HYDROGEN SENSOR BASED ON ELECTRICAL ISOLATION MAGNETIC RESISTANCE STRESS SENSITIVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/083137
Kind Code:
A1
Abstract:
Disclosed is a hydrogen sensor based on an electrical isolation magnetic resistance stress sensitive element, the hydrogen sensor comprising a deformable substrate (1); a magnetic resistance stress sensor bridge (2) located on the deformable substrate (1), an electrical isolation layer (3) covering the magnetic resistance stress sensor bridge (2), and a magnetic shielding layer (4) located on the electrical isolation layer (3); and a hydrogen sensitive layer (5) located above the deformable substrate (1), wherein an orthographic projection of the hydrogen sensitive layer (5) on the plane where the deformable substrate (1) is located covers the electrical isolation layer (3), the hydrogen sensitive layer (5) is used for adsorbing or desorbing hydrogen to generate expansion or contraction deformation and cause a stress change of the deformable substrate (1), and the magnetic resistance stress sensor bridge (2) is used for measuring a hydrogen concentration according to the stress change of the deformable substrate (1). Various performances of the hydrogen sensor are improved.
Inventors:
DEAK JAMES GEZA (CN)
ZHOU ZHIMIN (CN)
ZHOU ZHIMIN (CN)
Application Number:
PCT/CN2020/123946
Publication Date:
May 06, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
MULTIDIMENSION TECHNOLOGY CO LTD (CN)
International Classes:
G01N27/72
Foreign References:
| CN211043234U | 2020-07-17 | |||
| CN110646502A | 2020-01-03 | |||
| CN109839411A | 2019-06-04 | |||
| CN102692287A | 2012-09-26 | |||
| CN102565727A | 2012-07-11 | |||
| CN106546644A | 2017-03-29 | |||
| CN103267955A | 2013-08-28 | |||
| US20170343522A1 | 2017-11-30 |
Other References:
See also references of EP 4053551A4
Attorney, Agent or Firm:
SHANGHAI LUNGTIN LAW FIRM (CN)
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