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Title:
IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/262629
Kind Code:
A1
Abstract:
The imaging device according to an embodiment has a first substrate, a second substrate, wiring, and a trench. The first substrate has pixels each having a photodiode and a floating diffusion for holding a charge converted by the photodiode. The second substrate has a pixel circuit for reading a pixel signal based on the charges held by the floating diffusions in the pixels, the second substrate being stacked on the first substrate. The wiring penetrates through the first substrate and the second substrate in the stacking direction, and establishes an electrical connection between the floating diffusions in the first substrate and an amplifying transistor in the pixel circuit of the second substrate. The trench is formed at least in the second substrate so as to extend parallel to the wiring, the trench having a depth equal to or greater than the thickness of a semiconductor layer in the second substrate.

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Inventors:
KOMOTO TAKEYOSHI (JP)
NAKAMIZO MASAHIKO (JP)
ONO TOSHIAKI (JP)
YAMASHITA TOMONORI (JP)
Application Number:
PCT/JP2020/025285
Publication Date:
December 30, 2020
Filing Date:
June 26, 2020
Export Citation:
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Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L21/3205; H01L21/768; H01L21/822; H01L21/8234; H01L23/522; H01L27/00; H01L27/04; H01L27/088; H01L27/146; H04N5/369; H04N5/374
Domestic Patent References:
WO2015016140A12015-02-05
WO2018075099A12018-04-26
Foreign References:
JP2018125396A2018-08-09
JP2006019455A2006-01-19
JP2007294652A2007-11-08
JP2013008952A2013-01-10
JP2018148567A2018-09-20
JP2016181884A2016-10-13
JP2010245506A2010-10-28
Other References:
See also references of EP 3993011A4
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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