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Title:
IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD, AND PROJECTION EXPOSURE APPARATUS COMPRISING SUCH AN IMAGING OPTICAL UNIT
Document Type and Number:
WIPO Patent Application WO/2020/207768
Kind Code:
A8
Abstract:
An imaging optical unit (7) for a projection exposure apparatus is used to image an object field (4) into an image field (8). The projection exposure apparatus is embodied in such a way that a rectangular structuring field on an object to be imaged, which carries structures to be imaged, is imaged in the entirety thereof into an imaging field by displacement of the structuring field relative to the object field, said imaging field being displaced relative to the image field in a manner synchronized with the object displacement. The structuring field lies within a larger object specification field. The latter is defined by an object carrying the structures to be imaged and delimited by a rectangular specification field basic shape and convexly curved specification field corner regions. The object field (4) is spanned by two perpendicular field directions (x, y). The imaging optical unit (7) has a first reduction scale in the first field direction (x), which is given by a ratio of the extent in the first field direction (x) of, firstly, the structuring field and, secondly, the imaging field. The imaging optical unit (7) has a second reduction scale in the second field direction (y), which is given by a ratio of the extent in the second field direction (y) of, firstly, the structuring field and, secondly, the imaging field. The reduction scales and are chosen in such a way that an area of the structuring field is no more than 10% smaller than the area of the largest, rectangular Pareto structuring field which can be fitted into the object specification field. This results in an imaging optical unit with a well-corrected imageable field with, at the same time, a high imaging light throughput.

Inventors:
PATRA MICHAEL (DE)
MIGURA SASCHA (DE)
Application Number:
PCT/EP2020/057854
Publication Date:
December 03, 2020
Filing Date:
March 20, 2020
Export Citation:
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Assignee:
ZEISS CARL SMT GMBH (DE)
International Classes:
G02B13/08; G03F7/20
Attorney, Agent or Firm:
RAU, SCHNECK & HÜBNER PATENTANWÄLTE RECHTSANWÄLTE PARTGMBB (DE)
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