Title:
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2017/104382
Kind Code:
A1
Abstract:
An imprint apparatus includes a facing member that is arranged around a mold and faces a substrate, a first supply unit configured to supply a first gas between the mold and the substrate from a first supply port arranged between the mold and the facing member, and a second supply unit configured to supply a second gas between the facing member and the substrate from a second supply port arranged in the facing member. The facing member includes, between the first supply port and the second supply port, a flow path configured to guide the second gas which flows from the second supply port toward the mold to bypass the space between the mold and the substrate.
Inventors:
NAKAGAWA KAZUKI (JP)
Application Number:
PCT/JP2016/084972
Publication Date:
June 22, 2017
Filing Date:
November 25, 2016
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2014056854A | 2014-03-27 | |||
| JP2012174809A | 2012-09-10 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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