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Patent Searching and Data


Title:
IMPRINT DEVICE, OPERATING METHOD FOR SAME, AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2017/145924
Kind Code:
A1
Abstract:
Provided is an imprint device that forms a pattern on a substrate (101) by curing imprint material in a state in which the imprint material on the substrate is in contact with a mold, wherein the imprint device is provided with: a substrate chuck (102) having a substrate holding area for holding the substrate; a peripheral member (113) disposed so as to surround the side surfaces of the substrate held by the substrate chuck; and a control unit for controlling a cleaning process for cleaning at least part of an area of the peripheral member using a cleaning member (170) that includes a charged unit. The cleaning process includes an operation for moving the cleaning member relative to the peripheral member in a state in which the charged unit faces the at least part of the area of the peripheral member so that particles in the area are adsorbed by the charged unit.

Inventors:
MATSUOKA YOICHI (JP)
YAMAMOTO KIYOHITO (JP)
AZUMA HISANOBU (JP)
TERASHIMA SHIGERU (JP)
MAEDA TOSHIHIRO (JP)
YONEKAWA MASAMI (JP)
EMOTO KEIJI (JP)
NAKAGAWA KAZUKI (JP)
Application Number:
PCT/JP2017/005834
Publication Date:
August 31, 2017
Filing Date:
February 17, 2017
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C33/72; B29C59/02; H01L21/304
Foreign References:
JP2015149390A2015-08-20
JP2015122373A2015-07-02
JPH09219432A1997-08-19
JP2002353086A2002-12-06
JP2009117440A2009-05-28
JP2007017895A2007-01-25
JP2000252309A2000-09-14
JP2009286085A2009-12-10
JP2008260273A2008-10-30
JP2012084654A2012-04-26
JP2016208006A2016-12-08
JP2013069732A2013-04-18
JP2014183069A2014-09-29
JP2007329493A2007-12-20
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
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