Title:
IMPRINT DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/182532
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an imprint device capable of seamlessly manufacturing a replica mold and a final product. This imprint device for transferring a fine pattern to an object 3 to be molded includes: a film supply unit for moving a film 2 between a first roll 41 and a second roll 42; an arrangement means for arranging a master mold 1 for forming a replica pattern and the object 3 to be molded so that at least one among the replica pattern and the object 3 to be molded overlaps the film 2; a pressing unit 6 for pressing the film 2 and the master mold 1 or the object 3 to be molded with a fluid; a fixing means for fixing the replica pattern or the fine pattern; and a demolding means for demolding the film 2 from the master mold 1 or the object 3 to be molded.
Inventors:
SAKAMORI SHIGENORI (JP)
TANAKA SATORU (JP)
TANAKA SATORU (JP)
Application Number:
PCT/JP2021/009639
Publication Date:
September 16, 2021
Filing Date:
March 10, 2021
Export Citation:
Assignee:
SCIVAX CORP (JP)
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| WO2015072572A1 | 2015-05-21 | |||
| WO2008047540A1 | 2008-04-24 | |||
| WO2014013563A1 | 2014-01-23 |
Foreign References:
| JP2007165812A | 2007-06-28 | |||
| JP2016213423A | 2016-12-15 | |||
| JP6694101B1 | 2020-05-13 | |||
| JP2014046579A | 2014-03-17 | |||
| JP2010161186A | 2010-07-22 | |||
| JP2015513797A | 2015-05-14 |
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
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