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Patent Searching and Data


Title:
IMPRINTING DEVICE, AND ARTICLE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/134989
Kind Code:
A1
Abstract:
This imprinting device 1, which uses a die to form a pattern on a substrate 5, is provided with: a substrate stage 6 which holds the substrate 5 and can be moved; a perforated plate 10 which is a plate member provided with holes, and which is provided to the outer circumference of an area where the substrate 5 is held on the substrate stage 6; and a control unit which controls the suction of gas from a space above the substrate stage 6 via the holes, and the emission of gas into the space above the substrate stage 6, in order to inhibit entry of foreign matter 90 in the vicinity of the upper surface of the substrate stage 6 into an imprinting space.

Inventors:
SAKAMOTO EIJI (JP)
Application Number:
PCT/JP2017/000578
Publication Date:
August 10, 2017
Filing Date:
January 11, 2017
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/04
Foreign References:
JP2012080015A2012-04-19
JP2013069732A2013-04-18
JP2016208006A2016-12-08
JP2013026573A2013-02-04
JP2014183069A2014-09-29
JP2016004837A2016-01-12
Attorney, Agent or Firm:
TAKAOKA Ryoichi et al. (JP)
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