Title:
IMPRINTING DEVICE, IMPRINTING METHOD, AND METHOD FOR MANUFACTURING PRODUCT
Document Type and Number:
WIPO Patent Application WO/2017/094563
Kind Code:
A1
Abstract:
The present invention pertains to an imprinting device 100 in which an imprinting member 102 is caused to contact a die 103 and the imprinting member 102 is cured, thereby forming a pattern in the imprinting member 102, which is cured on a substrate 101. The present invention is characterized by having: a moving means 111 for moving the substrate 101; a discharging means 115 that includes a discharge port 116a, the discharging means 115 discharging the imprinting member 102 from the discharge port 116a while the substrate 101 is being moved by the moving means 111; a measuring means 126 for measuring information pertaining to the position in the height direction of the surface of the substrate 101; a determining means 122 for determining information pertaining to the distribution of distances between the discharge port 116a and the substrate 101 on the basis of the measurement results from the measuring means 126; and a correcting means 122 for correcting the criteria for supplying the imprinting member 102 on the basis of the information determined by the determining means 122.
Inventors:
TSUTSUMI RYOSUKE (JP)
SAKAMOTO EIJI (JP)
NAMBA HISASHI (JP)
SAKAMOTO EIJI (JP)
NAMBA HISASHI (JP)
Application Number:
PCT/JP2016/084601
Publication Date:
June 08, 2017
Filing Date:
November 22, 2016
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
| JP2012190877A | 2012-10-04 | |||
| JP2007296783A | 2007-11-15 | |||
| JP2013065624A | 2013-04-11 | |||
| JP2011128396A | 2011-06-30 | |||
| JP2013179219A | 2013-09-09 | |||
| JP2011151092A | 2011-08-04 | |||
| JP2010080632A | 2010-04-08 | |||
| JP2012069758A | 2012-04-05 |
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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