Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
IMPRINTING MOLD, IMPRINTING METHOD, AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2021/065393
Kind Code:
A1
Abstract:
Provided is an imprinting mold which has an imprinting surface that contacts a curable composition on a substrate and which is characterized in that the imprinting mold has an uneven pattern formed on the imprinting surface of the imprinting mold and, at an outer peripheral portion of the region where the uneven pattern is formed, a first stepped portion that has a first surface having a depth 0.5 to 2 times the depth of the uneven pattern.

Inventors:
KIYOHARA NAOKI (JP)
OGUCHI YUICHIRO (JP)
ITO TOSHIKI (JP)
Application Number:
PCT/JP2020/034084
Publication Date:
April 08, 2021
Filing Date:
September 09, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
JP2019160926A2019-09-19
JP2018056545A2018-04-05
JP2015130384A2015-07-16
JP2010258326A2010-11-11
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
Download PDF: