Title:
IMPRINTING TEMPLATE PRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/159310
Kind Code:
A1
Abstract:
An imprinting template production device 1 according to one embodiment is provided with: a support portion 3 that supports a template W equipped with a substrate 11, which has a main surface, and a protruding portion 12, which is provided on the main surface and has an end surface on the opposite side from the main surface and in which a recess/protrusion pattern is formed on said end surface, such that the protruding portion 12 faces downward; a vaporizing portion 5 that is provided on the support portion 3 below the template W and vaporizes a liquid-repellent material; and an adhesion prevention plate 7 that is provided on the support portion 3 below the template W, allows the vaporized liquid-repellent material to adhere to a side surface of the protruding portion 12 of the template W on the support portion 3, and prevents adhesion to the recess/protrusion pattern.
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Inventors:
NAKAMURA SATOSHI (JP)
DEMURA KENSUKE (JP)
MATSUSHIMA DAISUKE (JP)
HATANO MASAYUKI (JP)
KASHIWAGI HIROYUKI (JP)
KANG CHEN (JP)
IVAN PETROV GANACHEV (JP)
DEMURA KENSUKE (JP)
MATSUSHIMA DAISUKE (JP)
HATANO MASAYUKI (JP)
KASHIWAGI HIROYUKI (JP)
KANG CHEN (JP)
IVAN PETROV GANACHEV (JP)
Application Number:
PCT/JP2016/060820
Publication Date:
October 06, 2016
Filing Date:
March 31, 2016
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
TOSHIBA KK (JP)
TOSHIBA KK (JP)
International Classes:
B29C33/38; B29C59/02; H01L21/027
Foreign References:
| JP2013084686A | 2013-05-09 | |||
| JP2011224965A | 2011-11-10 | |||
| JP2014160754A | 2014-09-04 | |||
| JP2008248319A | 2008-10-16 |
Attorney, Agent or Firm:
MISAWA PATENT OFFICE, p. c. (JP)
Patent business corporation Misawa patent firm (JP)
Patent business corporation Misawa patent firm (JP)
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