Title:
INDEPENDENTLY DRIVEN MEMBRANE SEPARATION MECHANISM
Document Type and Number:
WIPO Patent Application WO/2019/105021
Kind Code:
A1
Abstract:
An independently driven membrane separation mechanism. The separation mechanism comprises an installation platform; one side of the installation platform is provided with a plurality of first adsorption components used for adsorbing bottom surfaces of chips, respectively; each of the first adsorption components corresponds to one chip; a plurality of second adsorption components, used for adsorbing membranes located on top surfaces of the chips, are disposed on the installation platform; the first adsorption components and the second adsorption components are in one-to-one correspondence, and the adsorbing direction of the first adsorption components and that of the second adsorption components are opposite; each of the second adsorption components is connected with a driving mechanism and can be moved up and down under the driving of the driving mechanism; and each driving mechanisms is independently disposed and are all disposed on the installation platform.
Inventors:
WEI MIN (CN)
Application Number:
PCT/CN2018/092386
Publication Date:
June 06, 2019
Filing Date:
June 22, 2018
Export Citation:
Assignee:
BEIJING CHUANGYU TECH CO LTD (CN)
International Classes:
H01L31/18; B32B38/10; H01L21/78
Foreign References:
| CN107946407A | 2018-04-20 | |||
| CN202434555U | 2012-09-12 | |||
| CN105655487A | 2016-06-08 | |||
| JP2004079026A | 2004-03-11 |
Attorney, Agent or Firm:
KANGXIN PARTNERS, P.C. (CN)
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