Title:
INDIUM PRECURSOR COMPOUND, METHOD FOR MANUFACTURING THIN FILM BY USING SAME, AND SUBSTRATE MANUFACTURED FROM SAME.
Document Type and Number:
WIPO Patent Application WO/2021/086006
Kind Code:
A1
Abstract:
The present invention relates to an indium precursor compound, a method for manufacturing a thin film by using same, and a substrate manufactured from same and, more specifically, to an indium precursor compound represented by chemical formula 1, a method for manufacturing a thin film by using same, and a substrate manufactured from same. The present invention has advantages of forming a uniform thin film, increasing productivity through an improved rate of deposition, being excellent in thermal stability and storage stability, and being easy to handle.
Inventors:
YEON CHANG BONG (KR)
KIM JIN HEE (KR)
JUNG JAE SUN (KR)
LEE SEOK JONG (KR)
KIM JIN HEE (KR)
JUNG JAE SUN (KR)
LEE SEOK JONG (KR)
Application Number:
PCT/KR2020/014801
Publication Date:
May 06, 2021
Filing Date:
October 28, 2020
Export Citation:
Assignee:
SOULBRAIN CO LTD (KR)
International Classes:
C07F5/00; C23C16/18; C23C16/34; C23C16/40; C23C16/455
Foreign References:
| KR20190121468A | 2019-10-28 | |||
| US5874131A | 1999-02-23 | |||
| KR20180056949A | 2018-05-30 | |||
| KR101221861B1 | 2013-01-14 | |||
| KR20180007815A | 2018-01-24 | |||
| KR20110020901A | 2011-03-03 |
Attorney, Agent or Firm:
NEWKOREA PATENT & LAW FIRM (KR)
Download PDF: