Title:
INGOT TEMPERATURE CONTROLLER AND WIRE SAWING DEVICE HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2021/153846
Kind Code:
A1
Abstract:
Provided is a wire sawing device comprising an ingot temperature controller, the wire sawing device comprising: a chamber; an ingot clamp supporting an ingot inside the chamber; a first roller and a second roller; a wire which is wound around the first roller and the second roller and cuts the ingot into a plurality of wafers by rotating; a temperature measuring unit which is mounted inside the chamber, in which the ingot is cut, and measures the temperature of the ingot; and a heater unit mounted inside the chamber.
Inventors:
JIN YOUNG IL (KR)
Application Number:
PCT/KR2020/006073
Publication Date:
August 05, 2021
Filing Date:
May 08, 2020
Export Citation:
Assignee:
SK SILTRON CO LTD (KR)
International Classes:
H01L21/67; B28D5/00; B28D5/04
Foreign References:
| US20060249134A1 | 2006-11-09 | |||
| KR20130017819A | 2013-02-20 | |||
| JP2006150505A | 2006-06-15 | |||
| KR20110090016A | 2011-08-10 | |||
| JP2001079747A | 2001-03-27 |
Attorney, Agent or Firm:
LEE, Seung Chan (KR)
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