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Title:
INORGANIC SOLID OBJECT PATTERN MANUFACTURING METHOD AND INORGANIC SOLID OBJECT PATTERN
Document Type and Number:
WIPO Patent Application WO/2021/200069
Kind Code:
A1
Abstract:
The inorganic solid object pattern manufacturing method according to one mode of the present invention comprises: an application step for applying, on an inorganic solid object, a composition containing a polymetalloxane and an organic solvent; a step for heating the coating film obtained in the application step at a temperature of 100-1000°C to obtain a heat-treated film; a step for forming a pattern of the heat-treated film; and a step for masking the pattern of the heat-treated film and performing a patterning process on the inorganic solid object through etching.

Inventors:
KAMOGAWA MASAO (JP)
SUWA MITSUHITO (JP)
HAYASAKA MAKOTO (JP)
Application Number:
PCT/JP2021/010376
Publication Date:
October 07, 2021
Filing Date:
March 15, 2021
Export Citation:
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Assignee:
TORAY INDUSTRIES (JP)
International Classes:
G03F7/11; G03F7/20; H01L21/027; H01L21/3065; H01L21/316
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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