Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2015/200307
Kind Code:
A3
Abstract:
A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement.

Inventors:
AIMI MARCO FRANCESCO (US)
SPENCE DAN KENRICK (US)
Application Number:
PCT/US2015/037155
Publication Date:
February 25, 2016
Filing Date:
June 23, 2015
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GEN ELECTRIC (US)
International Classes:
H01H59/00; B81B3/00
Foreign References:
US20090159409A12009-06-25
US20060087716A12006-04-27
US20120176135A12012-07-12
US6037719A2000-03-14
EP1426992A22004-06-09
Other References:
See also references of EP 3161847A4
Attorney, Agent or Firm:
BAXTER, William et al. (9900 W. Innovation Drive RP 213, Wauwatosa Wisconsin, US)
Download PDF: