Title:
INTEGRATED OPTICAL SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/056988
Kind Code:
A1
Abstract:
An integrated optical sensor (100) and a manufacturing method therefor. The integrated optical sensor (100) comprises at least a substrate (10), a light module layer (20), and multiple micro-lenses (40). The substrate (10) comprises multiple sensing pixels (11), the light module layer (20) is located on the substrate (10), and the multiple micro-lenses (40) are located on the light module layer (20). The thickness of the light module layer (20) defines the focal length of the multiple micro-lenses (40), and the multiple micro-lenses (40) focus target light (TL) from a target (F) in the multiple sensing pixels (11) after the target light (TL) experiences optical processing of the light module layer (20). The light module layer (20) comprises at least a first metal light blocking layer (22) and a first metal interlayer dielectric layer (23) located on the first metal light blocking layer (22), and the target light (TL) enters the multiple sensing pixels (11) through multiple first light holes (22A) of the first metal light blocking layer (22).
Inventors:
CHOU BRUCE C S (CN)
FAN CHEN-CHIH (CN)
FAN CHEN-CHIH (CN)
Application Number:
PCT/CN2020/079865
Publication Date:
April 01, 2021
Filing Date:
March 18, 2020
Export Citation:
Assignee:
EGIS TECH INC (CN)
International Classes:
H01L27/146; G06K9/00
Foreign References:
| US20090179142A1 | 2009-07-16 | |||
| CN101752309A | 2010-06-23 | |||
| CN107437047A | 2017-12-05 | |||
| CN101740588A | 2010-06-16 | |||
| CN101473440A | 2009-07-01 | |||
| CN105810698A | 2016-07-27 | |||
| KR20050020408A | 2005-03-04 |
Attorney, Agent or Firm:
BEIJING SANYOU INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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